於IC半導體、液晶面板、太陽能電池及LED等廠蝕刻及成膜製程中使用
C4F6, CF4, CHF3, CH2F2, C2F6, C3F8, C4F8, C2HF5, CH3F, C3F6, SF6, BCl3, Cl2, HBr, HCl, SO2, CH4, etc.
NF3, C3F8, SF6, C2F6, 20%F2/N2, CO2, HCl, HF(5N), etc.
NH3, N2O, SiF4, 1%PH3/H2, H2Se, SiH4, Si2H6, etc.
※N2O【販賣許可臨時證號：S001-01-00154、S001-01-00033。欲購買N2O者須提供環保署化學局所核可之購買許可才可購買。】
於晶圓、玻璃面板的清洗